The effect of heat treatment on the structure

of ZnO thin films derived from the sol–gel method


B. Akharkhach1, A. Rjeb1, S. Sayouri1*, J. Ghaymouni 2

1 Laboratoire de Physique Théorique et Appliqué, Faculté des sciences Dhar El Mehraz, B.P. 1796 Fès- Atlas, Maroc

2 Université de Versailles Saint Quentin Laboratoire d'Ingénierie des Systèmes de Versailles 10/12 
Avenue de l'Europe 78140 Velizy - France

* Corresponding author. E-mail:

Received: 20 May 2013; revised version accepted: 12 August 2013



     ZnO thin films on glass substrates were prepared by a sol-gel spin-coating method. The structural properties were characterized by X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). The ZnO films pre-heated at 300 °C and post-heated at 500 °C showed polycrystalline hexagonal structure with preferential orientation along the c axis, the surface morphology images shows skeletal wrinkle patterns. Pre-heating operation at 170 °C was found to strongly affect the surface morphology and enhance the orientation of the films along the c axis. The effect of thickness on the crystallinity of the films was also reported.


Keywords: ZnO thin films; Sol–gel; Thermal treatment; Wrinkles; SEM; AFM; XRD.

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