An industrializable Silicon-based microhotplate

for metal oxides gas sensors

 

P. Yoboué1*, A. Konaté1, O. Asseu1*, P. Ménini2,3

1 Ecole Supérieure Africaine des Technologies de l’Information et de la Communication (ESATIC), Abidjan, Treichville, Km 4 Bd de Marseille, 18 BP 1501 Abidjan 18, Cote d’Ivoire (http://www.esatic.ci/)

2 CNRS;LAAS; 7, avenue du colonel Roche, F-31077 Toulouse, France

3 Univ de Toulouse, Université Toulouse 3 Paul Sabatier, F-31062 Toulouse, France

* Corresponding author. E-mail: yoboue_pam@yahoo.fr; oasseu@yahoo.fr 

Received: 06 September 2013; revised version accepted: 16 April 2014

 

Abstract

     This article presents an industrializable silicon-based microhotplate for metal oxide gas sensors. It introduces an interesting approach and describes the technological optimizations used to reach high and stable operating temperature, in reducing intrinsic drift problems (due to commercial polysilicon heater). The microhotplate present low consumption of 70 mW for 600°C, good thermal homogeneity over the active area and a good mechanical stability.

 

Keywords: Microhotplates; Platinum; Metal oxides; Micro technology; Industrializable; Commercial gas sensors.

 


 

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