Effect of substrate temperature on cathodoluminescence of ITO thin films prepared by spray pyrolysis

A. Kachouane1, M. Addou1*, A. Bougrine1, A. El Hichou2, J. Ebothe2,

L. Dghoughi1, M. Lamrani1, J. C. Bernède3

1 Université Ibn Tofail, Faculté des Sciences, Département de Physique,

Laboratoire d’Optoélectronique et de Physico-Chimie des Matériaux. B.P 133, 14000 Kénitra, Maroc.

2 Université de Reims, Laboratoire de Microscopie électronique et Tunnel, Unité thermique d’Analyse Physique. 21,

Rue Clément Ader.B.P 138, 51685 Reims Cedex 02, France.

3 Université de Nantes, Equipe de Physique des Solides pour l’Electronique, Groupe Couches Minces et Matériaux Nouveaux,

FSTN, 2 rue la Houssinière, BP 9209 44322, Nantes Cedex 3, France.

* Corresponding author. E-mail : mohammed_addou@yahoo.com

Received : 07 May 200; revised version accepted : 13 May 2003

Abstract

Highly conducting and transparent tin-doped indium oxide (ITO) thin films were deposited on glass substrates by spray pyrolysis. The growths of ITO films under different deposition parameters were investigated. The Transmission, the resistivity and the cathodoluminescence of these films were found to be strongly dependent on these parameters. The films prepared at the optimum conditions exhibit low resistivity and optical transmission larger than 90% in the visible region. ITO cathodoluminescence films for different substrate temperatures ratio have been studied. These samples exhibit three luminescence bands in visible region localized respectively at 410 nm, 525 nm and 650 nm.

Keywords: ITO; Spray; Cathodoluminescence.

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